Plasma surface treatment apparatus Products and services

Asia wide Manufacturing Business Platform in Philippines

TECH DIRECTORY Philippines

Plasma surface treatment apparatus

Coating apparatus/Surface processing device/Related product

  • Plasma Cleaner SPE-2136A Plasma Cleaner SPE-2136A

    Removal of residues, surface reforming, and ashing of φ4 to 6 inch wafers is possible by using this new plasma cleaner. The automatic conveying mechanism contributes to prevention of wafer cracking and reduction of personnel expenses and operation time due to wafer transfer. In addition, the process chamber achieves high throughput by simultaneous processing of two wafers. 【Features】 ■Compact design:1400(W)×3000(D)×1900(H)mm ■Distribution:± 5% or less in a wafer ■Ultra-thin piezoelectric wafers such as SAW device ■Ar plasma cleaning (option) ※Please see the document for details. Please do not hesitate to contact us.

    Target industry: Electrical/Electronic Parts Semiconductors/LCD/FPD Automotive Parts

    SHOWA SHINKU CO., LTD.

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