Plasma Cleaner SPE-2136A

Asia wide Manufacturing Business Platform in Philippines

TECH DIRECTORY Philippines

Plasma Cleaner SPE-2136A

Plasma Cleaner SPE-2136A

Simultaneous processing of two wafers,High throughput,reduction of personnel expenses and operation time due to wafer transfer.

Removal of residues, surface reforming, and ashing of φ4 to 6 inch wafers is possible by using this new plasma cleaner.
The automatic conveying mechanism contributes to prevention of wafer cracking and reduction of personnel expenses and operation time due to wafer transfer.
In addition, the process chamber achieves high throughput by simultaneous processing of two wafers.


【Features】
■Compact design:1400(W)×3000(D)×1900(H)mm
■Distribution:± 5% or less in a wafer
■Ultra-thin piezoelectric wafers such as SAW device
■Ar plasma cleaning (option)

※Please see the document for details. Please do not hesitate to contact us.

Inquiry

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Stock in the Philippines

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Target industry

Electrical/Electronic Parts  Semiconductors/LCD/FPD  Automotive Parts

Company information

SHOWA SHINKU CO., LTD. SHOWA SHINKU CO., LTD.

Products and services features

【Outline specifications】
◎Processing method:Batch equipment with automatic conveyance
◎Vacuum pump :Dry pump
◎Installation dimensions(mm):W1400×D3000×H1900
◎Equipment weight:1000kg
◎Power capacity:AC200V(3φ)/15kVA(44A)
◎Chamber size(mm) :Processing room:φ440×H195

Usage / example

【Application】
1.Resist removal of various wafers electronic components
2.Surface modification before post-process plating
3.Remove organic contamination
4.Surface modification of resin material
5.Ultra-thin piezoelectric wafers such as SAW device

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